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A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes
Jun 03, 2016Author：
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Title: A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes
Authors: Zhou, C; Gong, Z; Chen, BK; Cao, ZQ; Yu, JZ; Ru, CH; Tan, M; Xie, SR; Sun, Y
Author Full Names: Zhou, Chao; Gong, Zheng; Chen, Brandon K.; Cao, Zhiqiang; Yu, Junzhi; Ru, Changhai; Tan, Min; Xie, Shaorong; Sun, Yu
Source: IEEE-ASME TRANSACTIONS ON MECHATRONICS, 21 (3):; 10.1109/TMECH.2016.2533636 JUN 2016
Language: English
Abstract: Probing nanostructures (e.g., nanoelectronics) requires accurate and precise nanopositioning. Furthermore, since measuring I-V data from dc to GHz typically takes more than a minute, tolerance for position drift is stringent during the data collection process. This paper reports a closed-loop controlled nanomanipulation system for operation inside a scanning electron microscope. A new position sensing method with low power consumption is used to achieve nanometer sensing resolution and effective heat dissipation management. For automated probing of nanostructures, the position sensor-based closed-loop probing approach was found to be four times faster than visually servoed probing, and ten times faster compared to manual operation. Probing accuracy was determined to be better than 3 nm and a drift rate lower than 1 nm/min.
ISSN: 1083-4435
eISSN: 1941-014X
IDS Number: DL4MC

Unique ID: WOS:000375609900004 

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